MKS Instruments, Inc. - Product Announcements

MKS DC Power Generators, utilized in the manufacture of ICs, storage media (CD, optical and magnetic), flat panel displays, solar cells, and enhancement coatings, offer improved process yield with superior arc control circuitry and 0.01% repeatability. (read more)

The all-digital MKS ALTA Mass Flow Controller (MFC) includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput and reduce overall system costs. (read more)

MKS Ion Industrial 7430 Matrix Charging System is the latest advancement in the Matrix Charger line for card tacking, chill roll tacking, ribbon tacking, and stack tacking in printing and binding applications. (read more)

The RMU Linux Logic Controller is an open, integrated platform for real-time automation control, data acquisition and process monitoring. Based on PowerPC™ and Linux technology, the RMU offers unprecedented levels of I/O and on-board features in a compact package. (read more)

The Series 46 Filter Housing Heaters are specially designed for biotechnology and pharmaceutical applications. A cost-effective alternative to traditional steam jacketed solutions, the Series 46 heaters eliminate the need for steam lines and reduce long maintenance times, significantly lowering cost of ownership, while complying with strict safety regulations. (read more)

HPS® Series 25 is a line of butt weld and clamp fittings designed and manufactured for the Biotechnology and Pharmaceutical processing industries. This family of products includes automatic tube weld ferrules, gaskets, clamps, tees, elbows, crosses, adapters and tubing produced in compliance with ASME BPE specifications. (read more)

The MultiGas™ 2030HS (High Speed) Gas Analyzer is an FTIR-based analyzer specically designed for monitoring automotive, diesel and catalyst combustion exhaust at 5 Hz sampling frequencies. (read more)

The next generation MKS MFC (piMFC) pressure-insensitive mass flow controller includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput. (read more)

The SurePower™ platform of RF Generators from MKS features the highest power available in a 3U height package (13 kW) at 13.56MHz. The SurePower platform's state-of-the-art RF topologies produce the highest reliability, reproducibility and accuracy of any generator in today's marketplace. (read more)

The MKS 627C/628C e-Baratron® Capacitance Manometers are specially designed for networking with Ethernet communications devices for real-time diagnostics. The new all-digital pressure manometers incorporate MKS' well-known Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to many critical manufacturing processes. (read more)

The Type 631B high temperature Baratron® capacitance manometer is a compact and low current solution for pressure measurement in difficult semiconductor and biopharmaceutical applications where condensable by-products exist. (read more)

The Type 890 Series Baratron® compact digital pressure transducers utilize an advanced digital microprocessor to produce exceptional stability, the lowest output drift on the market, and high accuracy up to 20 times better than conventional pressure transducers. (read more)

The Series 999 Quattro™ Vacuum Transducer from MKS Instruments combines all the pressure sensing technology required by today's advanced vacuum tools into one compact package with a single electronic interface. (read more)

The MKS PDR900 Controller is a stand alone, single channel power supply and readout unit for use with all HPS® Series 900 digital vacuum transducers. (read more)

The Cirrus™ Atmospheric Pressure Gas Monitoring system is ideal for the on-line monitoring and analysis of gases and gas mixtures including solvent vapors, hydrocarbons, inorganic gas species (including corrosives), freons and noble gases. Its compact design and flexible control front-end make the Cirrus system suitable for a broad range of applications. (read more)

The MKS MicroNode™ compact Fieldbus and Ethernet I/O product line provides high density, compact, and economical I/O solutions for popular DeviceNet™, Profibus® and Ethernet networks. (read more)

The O3MEGA™ ozone delivery subsystem is the most flexible, versatile and cost-effective ozone generation subsystem available. The O3MEGA subsystem incorporates MKS' field-proven high concentration, ultra clean ozone generation technology in a compact unit requiring up to 60% less space than competing ozone delivery systems. (read more)

MKS CONTINUUM™ is a universal gateway that enables communications between components using different communication technology and protocols including RS232, RS485/RS422, DeviceNet™, Profibus®, Modbus/TCP, Ethernet/IP and Profinet. In addition, CONTINUUM™'s cLogic™ technology enables customers to implement custom data translation and unique protocols. (read more)

The DELTA™ II Flow Ratio Controller is a critical process control instrument in the MKS line of digital control, web-enabled products providing the latest in gas flow ratio measurement and control technology necessary to meet the demands of multi-channel flow distribution. (read more)

The small footprint e-Vision RGA is the first with an integrated Ethernet interface and embedded web server enabling operation over any TCP/IP network, including the Internet. Web-enabled instruments take the next step in connectivity between the decision maker and a vacuum system in a lab or factory, whether that system is located "across the hall or around the world." (read more)

Incorporating advanced technology in the area of mass spectrometry and vacuum technology (patents pending), the PICO® helium sniffer provides fast, contamination-free, helium leak detection. As a sniffing-style helium leak detector, it detects leaks from pressurized lines or components with a minimum detectable leak rate of 1 x 10^-7 atm-cc/s. (read more)